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Canon to launch KrF lithography scanner rated at 400 wafers per hour in December

What happened

Canon Inc. said on November 10, 2026, that it will launch the FPA-6400ES6a, a krypton fluoride (KrF) scanner for manufacturing memory and logic semiconductors, in early December 2026; the scanner is rated at 400 wafers per hour. The company's release gave no exact launch date, price, or shipment volume.

Impact and signal

Medium impactImpact score: 55/100

Affected components and suppliers

KrF lithography scanner

Canon Inc.

FPA-6400ES6a

KrF scannerproduct launch400 wafers per hourmemorylogic

Source and time

Source: DigiTimes Asia · 11/10/2026 · View original source

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Canon to launch KrF lithography scanner rated at 400 wafers per hour in December

What happened

Impact and signal

Affected components and suppliers

Source and time

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