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China's lithography ambitions gain ground as SMEE claims 90% local sourcing in chipmaking tools

What happened

Shanghai Micro Electronics Equipment (SMEE) has showcased a new generation of domestically developed lithography systems spanning front-end wafer fabrication and advanced packaging, marking further progress in China's semiconductor equipment localisation. The company claims more than 90% of key components in its front-end systems are sourced domestically, with the equipment advancing into volume production. These are the company's own showcase and claims; the source does not state a timeline or independent verification for the volume production ramp.

Impact and signal

Medium impactImpact score: 58/100

Affected components and suppliers

lithography systems
Shanghai Micro Electronics Equipment (SMEE)
localizationlithographydomestic sourcingvolume productionfront-end wafer fabricationadvanced packaging

Source and time

Source: DigiTimes Asia · 11/8/2026 · View original source

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