Advanced Energy Unveils Centra Smart Hub for Improved Temperature Measurement in Next-Generation Semiconductor Tools

What happened

Advanced Energy Industries Inc (Nasdaq: AEIS) launched its new Centra™ Smart Hub at SEMICON West in San Francisco. Combined with the company's new Remote Smart Sensors (RSS), it enables more accurate wafer-temperature measurement and real-time temperature control for many lamp-heated Si and SiC thermal processes, such as rapid thermal annealing (RTA) and Epitaxial (Epi) growth. The company states it delivers up to a 40% improvement in accuracy over other standard solutions when measuring at either 3.3 um or 5.2 um and at temperatures up to 1700°C. The Centra Smart Hub includes embedded ECAT and Ethernet protocols for integration into leading system architectures; the hub is placed in an instrument rack and connected to the RSS, which is installed directly on the chamber and provides multiple measurement points across the wafer in ambient temperatures of up to 60°C. The source does not link this product to any specific component price or supply condition.

Impact and signal

Affected components and suppliers

Source and time

Source: EE Journal · 10/29/2026 · View original source