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ASML starts on Hyper NA EUV

What happened

ASML has begun a ten-year programme to reduce feature sizes from 8nm to 5nm, naming the new tool Hyper NA EUV, which raises the numerical aperture from 0.55 to at least 0.75, with an estimated machine cost of $724 million; Zeiss says it can already produce the mirrors to the required precision.

Impact and signal

Medium impactImpact score: 60/100

Affected components and suppliers

Hyper NA EUV

ASMLZeiss

Hyper NAEUVlithography

Source and time

Source: Electronics Weekly · 10/8/2026 · View original source

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ASML starts on Hyper NA EUV

What happened

Impact and signal

Affected components and suppliers

Source and time

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