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Molybdenum Quasi Phase-Only Masks Improve EUV Imaging (NYCU, TSMC)
What happened
Researchers from NYCU and TSMC published a paper introducing molybdenum-based quasi phase-only masks for high-contrast EUV imaging. This represents a potential paradigm shift in EUV PSM technology. The impact on current trading prices is neutral as this is a long-term R&D development.
Impact and signal
Low impactImpact score: 10/100
Affected components and suppliers
EUV MasksPhase Shift MasksMolybdenum
TSMCNational Yang Ming Chiao Tung University
EUVR&DTechnologyTSMC
Source and time
Source: Semiconductor Engineering · 9/11/2026 · View original source
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