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XIVER获得ASML PAS 5500 DUV光刻机,计划2027年在埃因霍温投产

October 15, 2026, Dutch specialty foundry XIVER has acquired an ASML PAS 5500 DUV lithography tool for its Eindhoven foundry, with the tool expected to be operational in 2027. The DUV stepper will complement XIVER’s existing i-line lithography equipment, enabling finer and more precisely aligned structures, including double-sided wafer patterning and sub‑micron 3D micromachining. XIVER says it will be the only mid‑size pure‑play foundry offering in‑house DUV lithography. 原文未说明原因。XIVER was carved out of Philips at the High Tech Campus in Eindhoven and acquired by Dutch investors in early 2025. Since then, it has been expanding its manufacturing capabilities in line with its customers’ roadmaps and expected capacity needs.

ASML PAS 5500 DUV lithography tool

来源:Evertiq · 2026/10/15 · 查看原始来源

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