Fujifilm Prepares for EUV Photoresist Mass Production in Pyeongtaek, Deepens Samsung Ties

What happened

Japan's Fujifilm is expanding its extreme ultraviolet (EUV) photoresist production capacity to deepen cooperation with Samsung Electronics. Brian O'Donnellley, president of Fujifilm Electronic Materials USA, said the company is producing EUV photoresists in Pyeongtaek and, although it has not yet entered full-scale mass production, some EUV PR products have passed qualification tests at major customers. Fujifilm has expanded EUV PR production facilities in Shizuoka, Japan (its primary hub for advanced photoresist development and production) and Pyeongtaek, South Korea (near Samsung, selected for its most advanced products); EUV PR production and inspection equipment at both locations began operating in October 2025. The source does not state when full-scale mass production in Pyeongtaek will begin. The company cited artificial intelligence (AI) driving demand for materials used in processes at 2 nanometers and below, and expansion of advanced manufacturing processes increasing demand for ArF and EUV photoresists as the stated reason. Separately, Fujifilm is expanding its CMP slurry production facility near Samsung's Cheonan campus, planning to increase production capacity by approximately 30%, with additional facilities scheduled to begin operating in the first half of 2027; Fujifilm holds the largest global market share in CMP slurries for copper interconnects. The company also operates a facility in Carrollton, Texas near Samsung's Taylor plant and is considering various options to expand its manufacturing presence in South Korea, where it currently has two production facilities.

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Source: The Elec · 10/21/2026 · View original source