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TSMC Says Low-NA EUV Will Carry It Further, Delaying High-NA Adoption

What happened

TSMC delays High-NA EUV adoption, opting for cheaper Low-NA multi-patterning to reduce CAPEX. This strategy maintains competitiveness for now but pushes High-NA adoption to 1nm nodes.

Impact and signal

Low impactImpact score: 20/100

Affected components and suppliers

EUV Lithography ToolsAdvanced Semiconductor Nodes

TSMC ASML

delayeuvcapextechnology

Source and time

Source: TechPowerUp · 4/23/2026 · View original source

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TSMC Says Low-NA EUV Will Carry It Further, Delaying High-NA Adoption

What happened

Impact and signal

Affected components and suppliers

Source and time

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